Chemical Vapor Deposition (CVD) & PECVD Furnace System
- Max Temp:1200 °C
- Atmosphere Control:Vacuum, N₂, Ar, H₂, mixed gas and other inert / reducing atmospheres
- Thermocouple:K-type (1200) / S-type (1400) / B-type (1600)
- Heating rate:≤ 20 °C / min
- Certification:CE / ISO 9001 certified
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Customized Vacuum Solutions
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High Thermal Efficiency
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Ultra-Clean Vacuum Environment
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Stable & Repeatable Results
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Industry-Grade Safety Design
Advanced CVD & PECVD Furnace Systems
Brother Furnace provides customized chemical vapor deposition systems for research laboratories, universities and industrial applications.
Our CVD furnace solutions support:
✓ Thermal CVD
✓ Plasma Enhanced CVD (PECVD)
✓ Graphene Growth
✓ Carbon Nanotube Synthesis
✓ Thin Film Deposition
✓ Semiconductor Material Research
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CVD System Categories
Thermal CVD Furnace High-temperature chemical vapor deposition system using thermal reaction technology. Applications:
| PECVD System Plasma-enhanced CVD system using a 13.56 MHz RF plasma source for high-quality thin film deposition. Applications:
| Graphene CVD Furnace Specially designed for graphene synthesis on copper foil and other catalytic substrates. Features:
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Carbon Nanotube CVD Furnace Designed for CNT growth and carbon nanomaterial research. Processes:
| Multi-Zone CVD Furnace Temperature gradient control improves deposition quality and process repeatability. Options:
| Customized CVD System Brother Furnace provides customized solutions including:
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Key Advantages of Brother CVD System
Precise Temperature Control
Advanced PID control system provides temperature accuracy up to ±1℃ for stable deposition processes.
Advanced Gas Delivery
Multi-channel mass flow controllers ensure accurate precursor and carrier gas control.
High Uniformity Deposition
Optimized gas distribution and heating structure improve film thickness uniformity.
Flexible Vacuum Configuration
Different vacuum systems are available:
Rotary vane pump
Diffusion pump
Molecular pump
Plasma Enhanced Deposition
PECVD models provide:
RF frequency: 13.56MHz
RF power: 300-500W
Technical Parameters
(The model and general dimensions need to be determined)
Product Name | CVD Chemical Vapor Deposition System |
Model | BR-CVD/PECVD |
Slide | With slide, the furnace can be slid to achieve rapid heating or cooling function |
Heating Zone Length | 400mm single heating zone/dual heating zone |
Furnace Tube Size | 60x1200mm (outer diameter x length) |
Furnace Tube Material | High purity quartz tube |
Operating Temperature | ≤1100℃ |
Temperature Control System | Artificial intelligence PID instrument, automatic temperature control |
Temperature Control Accuracy | ±1℃ (with over-temperature and thermocouple-off alarm functions) |
Heating Rate | Recommended 0~10℃/min |
Heating Element | High quality resistance wire |
Vacuum System | |
Rated Voltage | Single phase 220V 50Hz |
Gas Filling System | Inert gases such as nitrogen and argon |
Temperature Measuring | Thermocouple temperature measurement |
Shell Structure | Double-layer shell structure with air cooling system |
Vacuum Flange | It has an air inlet and a pressure control valve, pneumatic pressure relief valve and air release valve at the other end. |
Air Supply System | Four-way precision proton flow meter, adjust gas flow through touch screen |
Vacuum System | Rotary vane pump, the vacuum degree can reach 1Pa in the cold state of the empty furnace. Vacuum gauge: Imported digital display vacuum gauge displays the vacuum degree in real time with high accuracy. |
Gas Dosing system | The overall pressure range can be controlled -20kPa to 20kPa (relative pressure) |
Rated Voltage | Single phase 220V 50Hz |
RF Power Supply (PECVD only) | |
Signal Frequency | 13.56MHz±0.005% |
Power Output Range | 500W |
Maximum Reflected Power | 500W |
RF Output Interface | 50Ω,N-type,female |
Power Stability | ±0.1% |
Garmonic Components | ≤-50dbc |
Supply Voltage | Single-phase AC (187V-253V) frequency 50/60HZ |
Overall Machine Efficiency | >=70% |
Power Factor | >=90% |
Cooling Method | Forced air cooling |
Model | Tube Outer Dia*Heating Zone (mm) | Tube Length（mm） | Power(kW) | Max Temp(℃) | Gas Control | Ultimate Vacuum(Pa) |
BR-CVD-60 | Φ60*400 | 1200 | 3 | 1200 | 3 Way | 10Pa/7x10-3 |
BR-CVD-80 | Φ80*400 | 1200 | 4 | 1200 | 3 Way | 10Pa/7x10-3 |
BR-CVD-100 | Φ100*400 | 1200 | 6 | 1200 | 3 Way | 10Pa/7x10-3 |
Model | Tube Outer Dia*Heating Zone (mm) | Power (kW) | Max Temp (℃) | RF Power Supply | Gas Control | Ultimate Vacuum(Pa) | |
Frequency | Power(kW) | ||||||
BR-PECVD-60 | Φ60*450 | 4 | 1200 | 13.56MHz±0.005% | 300-500W | 3 Way | 10Pa/7x10-3 |
BR-PECVD-80 | Φ80*450 | 5 | 1200 | 3 Way | 10Pa/7x10-3 | ||
BR-PECVD-100 | Φ100*450 | 7 | 1200 | 3 Way | 10Pa/7x10-3 | ||
